ECEN 5923 - Introduction to MEMS

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ECEN 5923 - Introduction to MEMS

Prerequisite(s): 5843 or consent of instructor. Fundamentals of Microsystems. Topics include: energy transduction mechanisms, energy dissipation modeling, energy methods, mechanics of small scale, fabrication process design, micromachining, electronic interface.
Instructor: Dr. Reza Abdolvand
Dates: August 17 - December 4
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